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Properties of ZnO : Al films on polyester produced by de magnetron reactive sputtering

Materials Letters

High preferred (002) orientation Al-doped ZnO (ZAO) films have been prepared by de magnetron reactive sputtering of an alloy target (98.5 wt.% Zn-1.5 wt.% Al) onto polyester substrates. The structural, mechanical, electrical and optical properties were investigated. The ZAO film has a sheet resistance of as low as 47.5 Omega/square and an average visible transmittance of about 70%. An average IR reflectance of about 70% in the region of 2.5-25 mum also has been obtained. (C) 2001 Elsevier Science B.V. All rights reserved.

关键词: Al-doped ZnO (ZAO);polyester;mechanical;IR reflectance;thin-films;optical-properties;oxide-films;electrical-properties;rf;temperature;orientation;parameters;deposition;substrate